Accounting of Surface Roughness in Electron Probe Energy-Dispersive Analysisof Powder Materials
The features of electron probe energy dispersive spectra of several powder materials are studied. Comparing the experimental results with the literature data, the main factor affecting the results of the quantitative analysis is found to be the effect of the difference in absorption. To describe the features of X-ray intensity attenuation in powders, a theoretical model of absorption has been proposed and tested. In the described model, the surface of the specimen is considered as a combination of a large number of randomly oriented planes. Comparison of experimental data and results of modeling is carried out by analyzing the ratio of diagnostic lines intensities. The suggested model of characteristic radiation intensity attenuation in powders is in good agreement with experimental data. This mathematical method for taking into account surface roughness can be used in computer programs simulating X-ray characteristic radiation, and can be included in the software for electron probe analysis as an additional correction way when calculating the elemental composition of powder materials.