THE STRUCTURE AND OPTICAL PROPERTIES OF LANTHANUM DOPED TITANIUM DIOXIDE FILMS
By the X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic-force microscopy (AFM) and absorption spectroscopy methods the phase composition, structure and optical properties of oxides films based on titanium and lanthanum with thickness 300 nm, deposited by the magnetron sputtering with subsequent thermal-oxidation at<i> Т</i> = 723 К,<i> Т</i> = 873 К and<i> Т</i> = 1023 К and pulse photon annealing, has been investigated. It has been established that during thermal treatment process the oxide film consisting of La<sub>2</sub>(TiO<sub>3</sub>)<sub>3</sub> and La<sub>2</sub>TiO<sub>5</sub> has been generated. Absorption spectroscopy shows that these oxide films have high transparency (95 %) in the wavelength range from 350 to 900 nm. The analysis of edge absorption has shown that direct transition energy value amount<i> E</i><sub><i>gd1</i></sub><i> =3.70</i> and E<sub>gd2</sub>=3.06 eV and correspond to La<sub>2</sub>(TiO<sub>3</sub>)<sub>3</sub> and La<sub>2</sub>TiO<sub>5</sub> phases correspondingly.