Molecular dynamics simulation of Mo sputtering by the Ar gas cluster ion beam
Molecular dynamics simulation of gas cluster ion beam interaction with solid is presented inthis paper. The projectile is an Ar cluster ion with the energy of 10 keV and the size from 50 to 2000 atoms. The target is a Mo single crystal at room temperature. The incident direction is normal to the lattice (100) surface. Two series of simulation with different paramateres were performed. In the first series each cluster ion impacts the virgin crystal surface. In the second series the sequence of cluster impacts is simulated, taking into account the surface evolution due to the bombardment and the experimentally measured cluster size distribution. PARCAS molecular dynamics code was used for the simulations. Angular distributions of sputtered atoms were calculated for 1000 independent collisions and 2000 consequent collisions. It is shown that the surface roughness in the second approach influences the shape of the angular distributions. The benefits of using sequence simulation are shown.