Dynamic Characteristics of the Sensing Element of Microaccelerometer with Increased Damping Factor
The dynamic characteristics of the sensing element (SE) of a given design for increased air resistance are investigated. Vibrational excitation of the inertial mass (IM) are carried out by means of the рiezoelectric element, the registration of oscillations executed by the deviation of the laser beam deflected from the surface of the IM. The dependences of the resonance frequency and quality factor of the SE on the air pressure in the range 1 to 10<sup>5</sup> Pa, and <i>Q </i>dependnce of the air gap between IM and the substrate are obtained.