About adequacy of probe diagnostics in RF plasmas
Problems of probe diagnostics in radio frequency (RF) gas discharge plasma have been considered focusing on the ways and correctness criteria of their solution. It has been found out that presently the art of this diagnostics method has achieved high degree of reliability and sophistication. Objectivity of its results has been established through comparison of joint measurements of electron energy distribution functions using Langmuir probe and spectral line-ratio methods in the same RF plasma experiments. Mutual agreement of the obtained results had been assumed as an evidence for objectivity of both plasma diagnostics methods.