Two-Dimensional Model of a Non-Equilibrium Strongly Non-Uniform Microwave Discharge in a DC External Field
A self-consistent model of a non-equilibrium strongly inhomogeneous microwave discharge is described. The model is based on the simultaneous solution of the Maxwell equations, Poisson equation, Boltzmann equation for free plasma electrons, and the equations describing the vibrational kinetics and the kinetics of excited and charged particles in hydrogen plasma. The results of the first calculations are presented, which are in qualitative agreement with the experimental data.