Hardware registration of Ar ions implantaition and protons in technological applications
During experimental researches at proton and Ar implantation in GaAr and at the metals Cr, Cu, Ti, Al ions source spectra of ions implanting installation «Vesuvius-5» are researched at various extending voltage and current at weights-separators; is specified, use of the received spectra ions of a source, allows to be sure in practically complete exception of an opportunity of hit of ions of different weights, except for given, in implantable target.