Numerical Modeling of Microelectronic Heat Flux Sensor
The paper presents a simplified thermal and finite-element models of microelectronic heat flux sensor, features of a design are discussed. Thermal resistance is defined and expressions for a target signal of a sensor control are received. It is shown that the numerical simulation accurately describes the characteristics compared with the analytical model. A comparison of model calculations with experimental data, which confirmed the correctness of models. The proposed numerical model allows the optimization of the characteristics of the sensor.