Modeling of Thermal Flow Sensor of Membrane Type for Gas Flow Velocity
The output characteristics of the thermal flow sensor of membrane type based on the calorimetric principle of operation have been analyzed. The dependences of the output characteristics of the thermal flow sensor on its design parameters have been investigated. The change of the temperature distribution along the membrane due to the flow velocity has been shown and the influence of the distance between the thermistors, of the membrane thickness and material on the thermal flow sensor characteristics has been investigated. The simulation and experimental results have been compared. The obtained dependences may be used for optimization of a similar device configuration to increase sensitivity and expand the dynamic range of the specific purpose sensor.