Alternative transporting devices for ecologically perfect vacuum equipment of electronic technics
Tendencies of development of modern transporting means for ecologically perfect vacuum equipment of electronic technics are considered. It is shown that alternative transporting means of the equipment are the mechanical systems constructed on principles of contactless magnetic interaction and steered elastic deformation. The technique and results of calculation of devices on introduced pollution by deterioration microparticles in the controllable vacuum environment is presented. Such approach provides creation of the non-polluting equipment in the industry of high vacuum technologies.