GENERAL DESIGN OF SOFTWARE CONTROL SYSTEM FOR EQUIPMENT OF CRITICAL SIZES INSPECTION ON THE BASIS OF COMPUTER VISION
This paper describes the functions and the architecture of software control system for equipment of critical sizes inspection of integrated circuit layouts on the basis of computer vision. The advantages of the developed architecture are described, as well as its application for image processing of integrated circuit layouts. The system allows identifying effectively defects what it is especially important for VLSI manufacturing based on submicron technology.