DETERMINATION OF PHASE SHIFT IN WHITE-LIGHT INTERFEROMETER
Algorithm of phase shift determination by interferograms for nanorelief surface measurement using the method of partial scanning of correlograms is presented. The algorithm is based on analysis of distribution of interference signal intensity. It is shown that the calculation of scanning step using the proposed method reduces the impact of synchronous phase distortion. Amplitude noise and nonlinearity in correlograms were reduced from 7,5 % to 0,1 % and from 7 % to 0,2 %, correspondingly.