Methods of deterministic changes in the mass of the oscillator
Development and operation of any mass weighting system requires calibration. To calibrate the system the etalon mass is used. In its turn special approaches for performing calibrations are required for system of ultra-small mass measurement. This paper is devoted to development and realization of approaches for deterministic change mass of micromechanical device. These approaches can be used for calibration of small mass measurement system based on micromechanical device.