Perspectives of cubic zirconia using as micro- and photoelectronics material for photodetectors developing
Cubic zirconia is a monocrystal which possessing a unique combination of physico-chemical properties. Lately there were published several researches dedicated to its using in microelectronics. The perspectives of cubic zirconia using in photoelectronics are considered hereinafter. It is shown that this material is especially usable in the technology of photodetectors on Ge, InGaAs base. Main directions of cubic zirconia using are indicated ed where it is used as the protective and stabilizing layer and as substrate for epitaxial layers InGaAs and also as dielectric in the structure "semiconductor on dielectric" where semiconductor is InGaAs.