Axial distribution of ion mass-to-charge state in magnetron discharge plasma
The axial distribution of ion mass-to-charge state in planar magnetron plasma has been studied. Copper was used as the target material; argon was used as the operating gas. To study the ion mass-to-charge state an upgraded quadrupole mass spectrometer was used. The measurements were carried out along the axis of the discharge system at a distance of 15 to 45 cm from the magnetron target. The operating pressure was changed in the range from 1.2 ∙ 10-3 to 3 ∙ 10-3 Torr at the discharge current from 100 to 500 mA in a continuous mode. It was shown that at a distance of 15 cm from the magnetron, the argons ions predominate in a fractional ratio. At the maximum distance a significant proportion of copper ions is observed. The proportion of argons ions decreases with an increase of discharge current and an increase of operating pressure.