Increasing spatial resolution in surface charge measurements using capacitive probes
In this work, a numerical method was proposed for increasing the spatial resolution when measuring the surface charge density by the method of capacitive probes, which consists in solving the inverse problem of electrostatics for a flat charge distribution. It is shown that such an approach makes it possible to improve the resolution of the method when the characteristic dimensions of the charge inhomogeneity are smaller than the thickness of the dielectric. The technique was applied to study the amplitude distribution of the charge transferred to the barrier surface in a dielectric barrier discharge.