Influence of composition of plasma on mechanical tension in the covering from nitride of the titan
The work was done calculation of VAT system "substrate-coating" in the deposition of titanium and nitrogen plasma. Shows the influence the concentration of elements deposited on the surface of the growing coating on the stress distribution along the radius, as well as on the average voltage. The dependence of the depth of penetration into the substrate elements deposited on their concentrations at the surface of the coating.