Application of thermal and plasma treatments for modification of SnO2 thin films properties
Transparent (90%), nanostructured and gas-sensitive SnO2 films were synthesized by sol-gel technique on glass substrate. An influence of annealing and processing by hydrogen and oxygen glow discharge plasma on the microstructure, optical and electrical properties of SnO2 films is shown. A significant increase in sensitivity to ethanol is observed both after annealing and after treatment by H- or O-plasma. Optimal regime of thermal annealing (400°C, 6 h) of the synthesized by sol-gel technique SnO2 film is determined, allowing to achieve a maximum of gas sensitivity and a minimum of response time (2 s), improving the structure of the crystallites, while maintaining their small sizes (6 nm). Processing by H- or O-plasma of SnO2 films, prepared by the sol-gel technique, does not alter their phase composition, resulting in the growth of gas sensitivity is independent of the plasma type.