Pumps and thermo-sorbets compressors on the basis of alloys stores of hydrogen for the vacuum process equipment
The new direction of creation of pumps and thermo-sorbets compressors on the basis of alloys of stores-of hydrogen for the vacuum process equipment is considered. Designs of thermo-sorbets compressors integrated in a drive are offered. Materials and manufacturing techniques thermo-sorbets elements of pumps and compressors are shown.