TUNING THE FREQUENCY OF MICROMINIATURIZE MICROWAVE RESONATORS BASED ON FBAR-STRUCTURES OF ALUMINUM NITRIDE
The results of research on the effectiveness of two methods of adjusting the frequency of the resonators based on FBAR-structures of aluminum nitride are presented. The frequency change due to reduction of the mass of the electrode and also due to deposition on the surface of the resonator additional mass of dielectric material - silicon oxide had been studied. The dependences of the frequency shift on the duration of adjustment processes are given.