INFLUENCE OF THE MEMS SILICON SENSING ELEMENT GEOMETRY ON ITS NATURAL OSCILLATIONS
The regularities of the occurrence of frequencies and shapes of natural oscillations of a microelectromechanical system silicon sensing element, which is the basis of the MEMS accelerometer measuring system, are considered. Six natural frequencies and shapes are defined. The dependence of the natural frequencies on the geometry and location of the torsion bars and perforation of the silicon wafer is revealed. It is established that low frequency oscillation shapes are most sensitive to changes in the geometry of silicon torsion bars, and high frequency ones are determined almost exclusively by the geometry of the silicon wafer and are localized in its material. The most significant influence on the natural oscillations of the MEMS system element is exerted by the arrangement of torsion bars.