Designing an evaluation physical-mathematical model of RF-discharge Helicon type
In the framework of linear electrodynamics (in this case neglect the dependence of the dielectric tensor components of the plasma from the electromagnetic field excited by an external generator power) An approximate (estimated) mathematical model of the physical processes in the RF source helicon-type low-temperature rarefied plasma, which solves the problem of finding a self-consistent mathematical relationship between the injected power, the plasma parameters and electromagnetic fields excited in cylindrically symmetric RF plasma source. In the group on the experimental and calculated data are initially separate verification of the results of numerical calculations performed using the approximate mathematical model developed by RF plasma source helicon type.