ELABORATION OF MICROSTRUCTURED SUBTERAHERTZ FILTERS VIA LIGA TECHNOLOGY AND INVESTIGATION OF THEIR SELECTIVE PROPERTIES
We discuss the peculiar features of the LIGA-technology methods elaborated in the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and applied for producing quasi-optical subterahertz filters based on self-bearing microstructures of the metallic and pseudo-metallic types. The results of manufacturing the low- and high-aspect inductive microstructures with topology of dipole slots utilized as the selective elements in the band-pass filters for the frequency range 0,25–0,45 THz are presented. The details of spectral characterization of the developed filters using a BWO-spectroscopy technique are considered. A good agreement between the results of measurements and numerical simulations is demonstrated.