Vibroacoustic fiber optic micromechanical systems
Vibroacoustic fiber-optic systems are based on the micromechanical elements, intended for application in medicine and biology, are considered. The short review of the construction principles of two main types of fiber-optic sensor systems (amplitude and interferential types) is given. The theoretical analysis of the fiber-optic microphones and vibrometrs is resulted; their optimal design configurations are defined. The manufacturing technology of base of a sensitive element (micromechanical membranes based on the silicon-nitride) are short described. Researching results of the developed experimental samples such as peak-frequency characteristics of sensitivity, threshold (minimum measured) values of sound pressure and vibroacceleration are resulted.