THE ANALYSIS OF ELECTROMECHANICAL OPERATION OF IN-PLANE OVERLAP MEMS CONVERTER
The operation analysis and comparison results of characteristics of single- and double-capacitor in-plane overlap microelectromechanical (MEMS) vibration-to-electricity converters are presented. The analytical expressions for the parameters evaluation of these MEMS converters are obtained. It was shown that the maximum supply voltage of single-capacitor MEMS depends on its design and applied external force.