Impact of the Power Supply of Magnetron Sputtering System on the Properties of Deposited TiO<sub>2</sub> Films
Advantages of manufacturing precision optical coatings by magnetron sputtering with a power supply of a gas discharge in mid-frequency range of currents (applied to magnetron sputtering system (MSS)) are described. The importance of choosing optimal characteristics and operating modes of MSS power supply sources is demonstrated. The samples of TiO<sub>2</sub> films have been fabricated using the developed technological equipment of magnetron sputtering including multimode power supply system ofMSS at different frequencies of voltage pulses applied to MSS (other sputtering conditions being the same). The samples are studied using laser ellipsometry, atomic force microscopy, x-ray diffraction and x-ray reflectometry. The impact of pulsed current frequency fmag on the functional properties of TiO<sub>2</sub> films such as refractive index, density, and roughness is shown.