Thermomechanical sensitivity of uncooled bimaterial detector of IR‑range fabricated by technology of microoptomechanical systems
A method is presented intended for determination of thermomechanical sensitivity of the uncooled IR‑detector which uses bimaterial effect for energy transformation of incident IR‑radiation into a mechanical response. The mechanical response in the form of plane-parallel movement of a membrane resting on bimaterial beams is further transformed into an optical signal. To measure the thermomechanical sensitivity, an optoelectronic exploratory bench based on the optical profiler (interference microscope) having subnanometer resolution is assembled. The bimaterial IR‑detector is fabricated by technology of microoptomechanical systems (MOMS) and operates in 8‑14 μm range. The measured in air thermomechanical sensitivity of the detector makes 7.5 nm/K.