STUDY OF THE HEAT TRANSFER COEFFICIENT THERMAL CONDUCTIVITY DETECTOR, BASED ON MEMS TECHNOLOGIES
Developed a thermal conductivity detector using MEMS-technology for use in capillary gas chromatography. The study of the heat transfer coefficient depends on the geometry of the sensor and the physical properties of the gas. Found that the greatest influence on the heat transfer is the size of probes and thermal conductivity of the gas. The prototype thermal conductivity detector was created.