Development of a technique for studying thin films by scanning electron microscopy
Scanning electron microscope (SEM) studies of metal-dielectric films. The chemical compositions of the elements and the linear dimensions of metal-dielectric composite films (CoFeZr-Al2O3), (CoFeB-SiO2), (CoTaNb-Zr2O3) were studied. To measure the thickness of films on a thin Mylar substrate, the method of "scraping" the film from the substrate was developed and tested.