AN INTEGRATED APPROACH IN THE IMPLEMENTATION OF THE PROJECT TO CONNECT THE EQUIPMENT NANOELECTRONIC PRODUCTION
The generalization and systematization of practical experience in connecting the production equipment for the manufacture of crystals integrated nanoelectronics.In process of implementation of the project connecting the complex approach, taking into account the process requirements, the conditions of the installation and operation of the equipment, as well as the requirements for the installation, testing and qualification of connecting lines. The content of pre-work, as well as the features of the design stage, the installation and testing process gas lines, liquids and energy; examples of installation sites. Given the structure and content of the general stages under the control of the management of the connection project.