SYNTHESIS COMPOSITES CONTAINING MAX-PHASES FROM MAGNETRON MULTILAYER TI-SI-C AND NB-AL-C FILMS
Thin multilayer Ti-Si-C and Nb-Al-C structures were formed on silicon substrates by the method of the magnetron deposition. The annealing at temperatures not higher than 600 °C was used for synthesis composite materials containing MAX-phases compounds Nb<sub>2</sub>AlC and Ti<sub>3</sub>SiC<sub>2</sub>. These compounds are potentially useful due to remarkable combination of their properties: chemical, physical, electrical, and mechanical properties, which in many ways combine the characteristics of metals and ceramics. For example, MAX phases are typically resistant to oxidation and corrosion, elastically stiff, but at the same time they exhibit high thermal and electrical conductivities and are machinable. Using the methods of the scanning electron microscopy, X-Ray energy dispersive analysis, confocal microscopy and Raman spectroscopy, the structure and composition of the materials obtained are investigated. Possible ways of using the parameters of magnetron sputtering and annealing to increase the content of MAX phases in the resulting composites are discussed. Based on the characterization of thin layered Nb-Al-C and Ti-Si-C structures obtained by magnetron sputtering, it can be concluded that the formation of composites from them containing the MAX Nb<sub>2</sub>AlC and Ti<sub>3</sub>SiC<sub>2</sub> phases is possible at relatively low temperatures for such compounds (not higher than 600 °C. To increase the relative content of these MAX phases without increasing the annealing temperature, it is most likely necessary to increase the energy of the elemental components that react when the film is applied. This can be achieved as a reduction in the distance of the target-substrate, and increasing the power when spraying elements.