MONITORING OF GAS PHASE UNDER REACTIVE SPUTTERING OF YTTRIUM IN GLOW DISCHARGE
Emission and fluorescence spectra of the gas phase in a wavelength range of 580-650 nm have been investigated during yttrium, zirconium, and their alloys sputtering in a glow discharge in order to develop atomic spectroscopy methods for gas phase composition monitoring. Spectral lines at 584.2, 585.9, 587.4, 613.2, 614.8, 616.5, 617.9, 647.1, 648.7, and 650.3 nm have been identified as molecular lines of yttrium oxide. Energies of the corresponding transitions have been calculated. The correlation between the behavior of the emission and fluorescence spectra of the gas phase in the wavelength range under study has been found when sputtering Y in the glow discharge and varying the composition of the oxygen-argon mixture. The dependence of fluorescence and emission line intensities of yttrium oxide on oxygen partial pressure has been investigated.