Plasma parameters investigation of the RF inductive plasma source with diameter 46 cm. Part I. Plasma parameters in the skin layer
The experimental investigations of the effective electron temperature and the electron density in the skin layer of the inductive RF discharge in inert gases are represented in this paper. The range of pressure was 0.3-1000 mTorr. The results of research demonstrated non-monotonic plasma parameters dependence on pressure. It was shown that the elastic collision frequency in argon and krypton was lower than in helium at the pressures corresponding to the electron temperature minimum due to the Ramsauer effect.