Investigation of jet-flow through permeable heated barrier by direct simulation Monte-Carlo method
To obtain diamond films the hot-wire method has been used successfully for the activation of the gas phase in a number of studies. Extending the conditions for obtaining diamond-like coatings by chemical vapor deposition (CVD) of methane-hydrogen mixture led to a method of gas-jet deposition. The difference is the use of high-speed flow precursor at low pressure. In the gas-jet method the activator is a high-permeable barrier which usually leads to the destruction of a supersonic flow and dispersal of activated components. Numerical investigation of gas dynamic structure of the jet into a flooded space with the influence of a heated barrier was conducted using the direct simulation Monte Carlo method. The calculation allowed us to determine all the parameters of the macroscopic moments of the distribution function of molecules. A numerical simulation was to make a choice the optimal form of the activator, allowing to increase the concentration of activated molecules at the substrate compared to conventional heated filaments.