IMPROVEMENT OF LATERAL RESOLUTION UNDER DIMENSIONAL MEASUREMENTS OF NANORELIEF STEP STUCTURES
The phase shifting interferometry methods allow to reach longitudinal resolution up to ~ 0.1 nm, but value of lateral resolution remains on level of ~ 1 μm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use the sensor of sharp-edge position detection. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. Measurement process and experimental results are presented. The combining of measurement results performed by the profilometer and the sensor of sharp-edge position detection can allow to increase the resolution of measurement of distance between sharp edges on the reconstructed surface nanorelief.