The Theoretical Bases of Development and Creation of the Superminiature Micromechanica/ Multifunction Sensor of the Inertia/ Information
The possibility of creation superminiature (volume < 1 mm<sup>3</sup>) micromechanical multifunction (gyroscope + ac-celerometer) the sensor of the inertial information is considered and proved. The equations of motion of the sensor on any way moving basis in view of temperature disturbances and technology factors are injected and analyzed. Possible baseline designs elastic suspension of sensor are offered. Estimations of strained-deformed state of the sensor at mechanical and thermal effects are received, by means of the constructed finite-element models. The estimation of efficiency of functioning of the sensor in view of temperature and technological errors is received.