THE PILOT STUDIES PROCESSES OF FORMATION SUBMICRONIC PERIODICAL STRUCTURES BY THE INTERFERENCE LCVD TECHNIQUE
The technique of single-stage formation of the diffraction gratings with the period and the reference sizes less than a micron is developed. Processes of formation of submicron periodic structures are experimentally investigated by the method of interference laser-induced chemical vapor deposition (LCVD), in which on a surface of a substrate the light (hot) pattern is formed as result of a two-beam interference.