RESEARCH MODES OF THE FORMATION AND MODIFICATION ORIENTED ARRAYS OF CARBON NANOTUBES BY PECVD ON NANOTECHNOLOGICAL COMPLEX NANOFAB NTK-9
This paper represents the of experimental studies modes of forming a vertically-oriented arrays of carbon nanotubes (CNT) and subsequently modified by focused ion beam (FIB) to create a hybrid of carbon nanostructures (HCNT). Also this paper covers issues connected with study of formation mechanics and growth of CNT, modification of CNT under the FIB influence and defining technological process characteristics of HYNT formation. Experimental studies on creation of HCNTs are performed, which resulted in making of modified Y-branched hybrid carbon nanostructures and nanostructures covered with carbon scales that are more developed surface and complex geometric shapes.