HIGH INTENSITY ARGON CLUSTER BEAMS FORMATION FOR TECHNOLOGICAL PROCESSES
Modernization of experimental complex LEMPUS-1 was done. Experimental investigations of argon cluster beams formation for ion-cluster surface modification technology were performed. Intensity of cluster beams up to 5*10<sup>14</sup> clusters per cm<sup>2</sup> per sec with average cluster size about 1300 was obtained. It was found the optimal conditions for cluster beam formation.