Monitoring and control of oscillations properties of high-speed electric spindle on aerostatic bearing supports
The paper presents the results of research using the developed in the State Scientific Institution “Joint Institute of Mechanical Engineering of the National Academy of Sciences of Belarus” together with Planar Holding the measuring and control module COMPASS of radial and axial oscillations of a shaft of a high-speed electric spindle on the aerostatic bearing supports, in many respects defining conditions of initial interaction of the cutting diamond wheel with a semiconductor plate at its division into crystals and, under the adverse conditions of this interaction, leading to chips and cracks on a semiconductor plate and (or) a diamond disk, and in some cases - to their destruction. Influence of rotation frequencies of a shaft and angular position of the cutting diamond disk on their intensity is established. It is shown that the intensity of these oscillations can be operated efficiently by external visualization and (or) filing the firmware tools, the analysis of parameters of these oscillations and the choice including automated, of rational rotation frequencies and selection of an angular position of the cutting diamond disk when adjusting.