The initial stage of charged particle beam interaction with target surface
The paper presents a mathematical model of the initial stage of charged particles beam interaction with metal surface. The model allows studying the influence of coexisting nonlinear waves of different physical nature under nonisothermal conditions. It is assumed that the particles have sufficient energy for generation elastic waves of mechanical disturbances in the target surface and lead to a change in the substrate temperature. It is shown that the propagation velocity of a mechanical wave more than the propagation velocity of thermal and diffusion waves. The problem is solved numerically by an implicit difference scheme. Some modifications of the mathematical model expand its applicability, for example, for study the interaction process of the particle flux with the target surface with a previously deposited thin layer (coating, film), for the case of combined particle flow treatment.