Method of Fabrication Biochips
A new manufacturing method of a stamp or a mold is described. They can be used to mold biochips of various plastics. A typical sequence of operations in LIGA technology is as follows: the formation of a thick resistive mask by deep X-ray lithography, the creation of a stamp (or mold) by galvanoplasty and the manufacture of plastic products using a stamp (or mold). This report describes a different sequence of operations: the formation of a thick resistive mask by deep photolithography on the working surface of blank of stamp (or mold), creating a relief of stamp by plasma chemical etching through a resistive mask, stamping (or molding) of plastic products, using the resulting stamp (or mold). A new method of polymerization of plexiglass from the electron-irradiated MMA prepolymer is also described. It has advantages over polymerization methods using benzoyl peroxide as the initiator of polymerization, because it expands the spectral range of transparency of the resulting plexiglass. This makes it possible to combine biochips produced by this technology with laser-induced fluorescence to detect analyzed samples in a wider spectral range.